Abstract
Single crystal silicon MEMS resonators are a potential alternative to quartz for timing and frequency control applications. Even if capacitive resonators with very high quality factors have been demonstrated and produced commercially, in order to achieve a good electromechanical coupling and admissible impedance levels, large bias voltages and submicron gaps are required. To overcome these challenges, piezotransduced bulk MEMS resonators have rapidly emerged as a valid alternative. We propose a numerical strategy to simulate dissipation mech- anisms that correctly reproduce available experimental data.
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