Optimization of linearity of piezoresistive pressure sensor based on pade approximation

Abstract

To optimize nonlinearity and temperature drift of silicon piezoresistive pressure sensor, novel calibration algorithm based on Pade approximation is adopted in the paper. The output data of the pressure sensor is processed by the novel algorithm to remove the influences of the cross-sensitivity and the unexpected jump points. High accuracy up to 0.01% FS can be achieved based on the algorithm. Compared with the other published algorithms, the proposed algorithm shows the merits of high accuracy, less memory consumption, and low cost. The algorithm can have potential application in the field of the intelligent sensor with the requirement of high output accuracy.