Abstract
This study provides the models to predict the relationship between laser process parameters and bump shape parameters. An analytical model and an empirical model to determine the radius of curvature are established. A stiction model which uses curvature information to predict the stiction force for V and W type laser texture is also presented and used for simulation. The results suggest that laser texture generated by a laser system with a smaller focus spot size and shorter pulse width has lower radius of rim curvature and lower stiction. Therefore, interface stiction can be minimized by optimizing the bump spacing arrangement and by proper selection of laser and optics.
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