Abstract

We report on the optimization of laser cutting of thin Al2O3 ceramic layers using a design of experiment (DOE) approach. DOE allows to separate the most important influencing factors on the targeted cutting process, to clarify their interaction, to reduce the overall amount of parameter sets that need to be examined and to identify the optimized parameter regions, respectively. Using both, a continuous wave 500 W fiber laser and a 200W CO2 laser, we have optimized and compared the cutting of 250μm thin Al2O3 ceramic substrate layers applying a commercial DOE software. Our results demonstrate the potential of DOE to optimize laser material processes.

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