Optimization of gas mixtures of multiband excilamps

Abstract

The paper considers the problem of optimizing gas-discharge sources of multiband UV radiation --- excilamps. A method is proposed for estimating the ratio of partial pressures of the components of a gas mixture, which makes it possible to simplify the process of developing a multiband excilamp with the desired power ratio of the emission bands. It is shown that the optimization of a multiband excilamp on a mixture of one noble gas with several halogen carriers can be reduced to the problem of optimizing an excilamp on a two-component mixture. If, in addition to the radiation of exciplex molecules, the radiation of excimer molecules is of importance, then the method makes it possible to control the relative contribution of the powers emitted by these molecules. Keywords: gas discharge, sources of ultraviolet radiation, kinetics of plasma-chemical processes, excimer and exciplex molecules.