Optimization of First Mode Sensitivity of V-Shaped AFM Cantilever Using Genetic Algorithm Method

Abstract

Atomic force microscopes (AFM) are widely used for feature detection and scanning surface topography of different materials. Contrast of topography images is significantly influenced by the sensitivity of AFM micro cantilever which means enhancement of sensitivity leads to increase of topography images resolution So, in the last years numerous scientists interested in studying the effects of different parameters such as geometric one on the sensitivity of AFM micro cantilevers. V-shape micro cantilever types of AFMs probe are widely used to scan various types of surfaces. In V-shape micro cantilevers, there are many geometric and design parameters which influence the flexural sensitivity of the micro beam, noticeably. In this paper evaluation of optimum geometric parameters and optimum cantilever slope is considered as a significant purpose in order to obtain maximum flexural sensitivity by using genetic algorithm optimization method. In the calculations, the normal and lateral interaction forces between AFM tip and sample surface is considered and modeled by linear springs which represent the contact stiffness of the sample surface. Also, a relation for flexural sensitivity of AFM cantilever as a function of geometric parameters and cantilever slope is derived which is used in optimization step by employing a genetic algorithm program. Using genetic algorithm method, the optimum geometric parameters and cantilever slope are calculated which maximize the flexural sensitivity of the first mode of a V-shape cantilever for various values of normal contact stiffness. These optimum parameters versus normal contact stiffness are presented in some result figures. The results show that for any contact stiffness, there are a cantilever slope and a set of geometrical parameters which provide the maximum sensitivity for AFM probe. Adopting these parameters for the design of V-shape micro cantilever according to the sample contact stiffness, maximum flexural sensitivity can be obtained, so that high contrast images are reachable.