Abstract
We have simulated ion trajectories with the SIMION 3D, version 7.0, package to optimize the extraction system of a cold-cathode ion source and compared the results with experimental data collected under the same operational conditions. The simulation determined the negative voltage applied to the extractor electrode and the extraction gap widths that maximize the ion-beam current for singly charged nitrogen ions with low emittance and small diameter. The experiment measured the input electrical discharge and output ion beam characteristics of the source at different nitrogen pressures. The extractor electrode voltage and the extraction gap width were determined at 8 × 10−4 Torr nitrogen. The results of the simulation agreed well with the experimental data.
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