Optimization of current distribution coefficients to decouple the 6-DOF fine stage of lithographic equipment

Abstract

This paper presents a decouple control method based on optimization of current distribution coefficients to decrease the coupling effects caused by uncertain current distribution coefficients between multi-degrees of freedom, this method can applied to multi-input multi-output (MIMO) system like 6-DOF fine stage of lithographic equipment. The minimum square of residual error between the measured output and the estimated output is proposed as the objective based on the analytical model of the fine stage. The step experiments are carried out to verify the decoupling effectiveness for MIMO system.