Abstract
The output energy and beam divergence of an injection-seeded KrF laser system, operating at 248 nm, were measured for twelve different coupled confocal unstable cavity arrangements, as a function of the relative timing between the slave and master oscillator lasers as well as of the cavity magnification. The output energy was found to be strongly dependent on both the cavity magnification and the time delay, although the beam divergence shows a less sensitive dependence. An optimized output of 2.2 J in 23 ns with a divergence of 38 μrad was achieved, representing a brightness several times larger than any previously reported for a system of this type.
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