Optimization of buffer layers for AlGaAs/InGaAs/GaAs pseudomorphic high electron mobility transistors by atmospheric pressure metalorganic chemical vapor deposition

Abstract

Pseudomorphic AlGaAs/InGaAs/GaAs high electron mobility transistors (HEMT) incorporating various types of buffer layers were fabricated (D = 0.50 × 100μm) and characterized by Hall-effect measurements, low temperature photoluminescence (PL), and room temperature IV characteristics. The devices fabricated with a thick (5000A) undoped high purity GaAs buffer layer grown at 650° C showed poor pinch-off characteristics, high output conductance and large leakage currents (>2 mA at pinch-off). Devices incorporating an undoped high purity GaAs (3000A) buffer layer grown at 550° C showed sharp pinch-off characteristics, low output conductance, and low leakage currents (1.3 mA at pinch-off). Low temperature growth of GaAs (550° C) enhanced carbon incorporation resulting in increasedp-type characteristics. This type of buffer layer provided additional barrier height between the active layer and the substrate reducing the injection of electrons into the substrate.