Optimization of Al-doped ZnO films by RF magnetron sputtering at room temperature for Cu (In, Ga) Se2 solar cells

Abstract

In this work, Al-doped zinc oxide (AZO) thin films were deposited by RF magnetron sputtering with various RF power at room temperature. The effect of RF power on the structural, electrical, and optical properties of AZO thin films were investigated by XRD, SEM, UV–Vis–NIR spectroscopy and Hall measurements. The lowest resistivity of 1.8×10−3 Ω·cm was obtained at the highest RF power of 450 W. The average optical transmittance is about 90% in the visible range and above 80% in the range of 300-2000 nm. CIGS thin-film solar cells were prepared using the AZO films as the windows layer and an efficiency of 15.36% in CIGS solar cell has been achieved.