Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations

Abstract

This study presents and demonstrates an algorithm for computing a dynamic model for a thin film deposition process. The proposed algorithm is used on high dimensional Kinetic Monte Carlo (KMC) simulations and consists of applying principal component analysis (PCA) for reducing the state dimension, a self organizing map (SOM) for grouping similar surface configurations and simple cell mapping (SCM) for identifying the transitions between different surface configuration groups. The error associated with this model reduction approach is characterized by running more than 1000 test simulations with highly dynamic and random input profiles. The global error, which is the normalized Euclidean distance between the simulated and predicted states, is found to be less than 1% on average relative to the test simulation results. This indicates that our reduced order dynamic model, which was developed using a rather small simulation set, was able to accurately predict the evolution of the film microstructure for much larger simulation sets and a wide range of process conditions. Minimization of the deposition time to reach a desired film structure has also been achieved using this model. Hence, our study showed that the proposed algorithm is useful for extracting dynamic models from high dimensional and noisy molecular simulation data.