Optimization of a Suspension of a Micromechanical Accelerometer in an Angular Velocity Measurement Unit

Abstract

Optimization of the suspension of the micromechanical accelerometer, which is a part of an angular velocity measurement unit, was considered. This problem was faced because of the need to improve the design of the existing device to meet new technical requirements. Shock loads up to 1 000 g exceed ultimate loads for micromechanical accelerometers by several orders of magnitude. During the study, it turned out that the measurement unit shell works as a resonator, so the shock loads on the micromechanical accelerometer can even exceed 1 000g. In this case, suspensions of the micromechanical accelerometer are deformed in the plane of the accelerometer, which causes their destruction. The solution to this problem was hampered by the strict limits on the overall dimensions of the device. The existing shock dampers that could absorb such shock loads simply did not fit into the attachment points. Therefore, an original spring was designed and manufactured for this purpose. At the final stage, an additional system of passive heat outlets from the accelerometer to the device shell was designed and installed.