Optimization of a micro Coriolis mass flow sensor

Abstract

In this paper we present Finite Element models to optimize the Lorentz force actuation of a micro Coriolis mass flow sensor. The models specify several different configurations for the permanent magnets used to create the magnetic field for the actuation. The models are used to compare the different configurations with relation to the strength of the Lorentz force used for actuation. Using these models the magnetic field outside the sensor area has been reduced by 6 orders of magnitude. The models have been validated with measurements.