Optimization analysis of ultra-precision flying-tool cutting machine for optical elements

Abstract

With the development of the modern state of optical engineering, large diameter (400×400 mm) of optical element processing and its whole surface shape accuracy is 0.1 micron (λ/ 6). It's on special crystal material single point diamond fly knife cutting ultra-precision machine tools put forward higher request, the bed is equipped with stable, the lathe bed equipment for the foundation design, and set the parts of the material. We think about the precision analysis of the external influencing factors of equipment, and design the model of equipment bed. In the bed model, the static simulation analysis is made under the two schemes of basic design and optimized reinforcement, respectively. And we compared the necessary design model and optimized design model. The total deformation was 0.409 microns for bed base, 0.268 microns for oblique rib, and 0.312 microns for circular rib. And we analyzed the deformation in X, Y and Z directions.