Abstract

Ultraprecision machined components with micro-structured surfaces in micrometer or nanometer range have gained wide applications especially in optical industry. A technique called fast tool servo (FTS) diamond turning is superior in fabricating precision and complicated micro-structured surfaces with wavelength above tens of microns. However, in order to obtain optimal machined surface quality, the machining parameters need to be selected carefully. In this paper, optimal selection of the machining parameters, including spindle speed, sampling number, feedrate and tool geometry, for fabricating micro-structured surfaces by FTS diamond turning is presented. A simulation system is developed to select feedrate and tool geometry by computing the theoretical surface roughness, spindle speed, and sampling number based on the FTS dynamics and the motion controller capability. Experiments have been carried out to show the effect of the machining parameters. In addition, machining of typical micro-structured surfaces with machining parameters selected by the presented approach proves the effectiveness of the proposed optimal machining parameters selection method and the designed FTS diamond turning machine.

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