Abstract
This paper investigates the possibility of utilising an electrostatic multiple cylinder lens to focus the beam in microprobes. Multiple cylinders reduce the lens potentials which are required. We use a new analytical model of the axial potential distribution varying the parameters of this distribution and the size of the object and aperture diaphragms to obtain the minimum spot size at the specimen for a given beam emittance and finding by this way the optimal parameters of the axial potential distribution. For synthesising the optimal physical model we applied an accurate version of the Integral Equation Method to solve Laplace's equation in order to obtain the parameters of the physical model which has the same axial potential distribution as the optimal analytical model.
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