Abstract
This study presents the behavior of a micro cantilever beam accelerometer under electrostatic actuation by using the analytical and numerical method. The objective of this study is to determine optimal design of capacitive micro cantilever beam accelerometer in term of reducing the beam deflection with respect to applied acceleration but keeping the distance between electrodes. The structure contains proof mass which is suspended between fixed rigid electrodes to provide differential capacitance measurements. ANSYSO is used for finite element analysis (FEA) modeling and simulation. The analytical modeling is done by using C programming. Three dimensional modeling is done for six different loading conditions in order to come out with the optimal design. The results obtained from both the analytical and finite element models are found to be in excellent agreement.
Highlights
Recent scientific and technological advances in micro technologies have produced an increasing interest in the application of micromechanical freestanding structures in many fields where advance performance, high sensitivity and reduce dimensions are required (Bianco et al, 2008)
Cantilever beams are widely used as the basic components in micro-sensors, micro-switches and RF-microelectromechanical system (MEMS) as well as in experimental micromechanics for evaluating mechanical properties and the strength of materials (Ballestra et al, 2008)
MEMS accelerometers can be fabricated by using bulk micromachining or surface micromachining. (Fricke and Obermier, 1993)
Summary
Recent scientific and technological advances in micro technologies have produced an increasing interest in the application of micromechanical freestanding structures (cantilevers, bridges and diaphragms) in many fields where advance performance, high sensitivity and reduce dimensions are required (Bianco et al, 2008). Cantilever beams are widely used as the basic components in micro-sensors, micro-switches and RF-MEMS as well as in experimental micromechanics for evaluating mechanical properties and the strength of materials (Ballestra et al, 2008). A sensor is a device that measures information from a surrounding environment and provides an electrical output signal in response to the parameter it measures. An actuator is a device that converts an electrical signal into an action. It can create a force to manipulate itself, other mechanical devices or the surrounding environment to perform some useful function. The technology of MEMS enables the fabrication of tiny, mechanical structures from silicon wafers offering three characteristic features of technology, miniaturization multiplicity and microelectronics
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