Abstract
This paper presents an optimal design for an in-plane traveling wave rotary ultrasonic motor with a composite transducer. The structure of the stator was improved to minimize negative influence on vibration modes from the supporter, and a new stator based on it was designed and fabricated. Two operating modal frequencies of new stator have been adjusted to equality by reducing one structural parameter according to sensitivity analysis. The performance experiments of the prototype motor shows that maximum no-load speed is 450rpm and maximum torque achieves 0.04Nm at an exciting voltage of 200Vrms.
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