Abstract
Air-floating platform is the core component of long raster engraving system. In order to design an air-floating platform to greatly meet the demands of long raster engraving, this paper, based on the validation of simulation model accuracy by test platform, proposes a three-dimension finite element model about gas film, and investigates the influence of the gas film thickness, air pressure and width of bottom guideway on the loaded capacity and air consumption by orthogonal test method. Then the best design plan of air-floating platform structure was determined by range analysis method. The results showed that air film thickness H=0.02 mm, gas supply pressure Ps=0.15 MPa, width of bottom guideway Bx=140 mm, the loading capacity of single-sided guideway is about 3177 N, its air consumption is 191487 mm3/s. Hence, this plan can not only meet the requirements of the loading capacity but also reduce air consumption of air-floating platform so as to provide a basis for optimum structure design about air-floating platform.
Highlights
The precision air-floating platform is widely applied in the fields of lithography and precision measurement
Three major international lithography equipment producers adopt air-floating platform as their core subsystem, such as, air flotation bearing support used by ASML company from Holland to realize high speed and large range motion on the horizontal plane, symmetrical aerostatic guideway driving technology used by Japanese Nikon and Canon company to realize nanometer scale motion on the horizontal plane [3]
Loading capacity and gas consumption for airfloating guideway are key indicators, which the platform runs smoothly depends on the load capacity, and the production cost depends on the gas consumption capacity during continuous operation for a long time
Summary
The precision air-floating platform is widely applied in the fields of lithography and precision measurement. It consists of aerostatic air-floating guideway and linear motor drive, which is connected by non-mechanical method to efficiently avoid the vibration disturbance from external environment and free from the friction, heat, wear, lubrication caused by traditional bearings [1,2]. This paper intends to design a X-Y direction airfloating platform to engrave 3000 mm raster motherboard for 4-5 days. In order to meet the requirements of long raster engraving, it is greatly necessary to optimize the platform structural parameters when the form of air-floating platform is determined
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