Abstract
This paper explores a comparative study between different designs of electrothermal microactuators with emphasis on optimal design and performance key factors. For this purpose, two typical designs for electrothermal microactuators with the same material properties are studied: one with different beam lengths (design A), other one with different beam sections and a flexure part (design B). Analytical model and finite element model (FEM) have been developed and validated by comparison of simulation results with experimental results in literature. Optimal geometrical dimensions to achieve maximum deflection have been obtained using genetic algorithm (GA). As the key factors, temperature distribution, power consumption and deflection of these microactuators have been compared in the range of microactuator functionality. Design B is more sensitive to geometrical dimension variation. Using optimal geometrical dimensions, an increase of almost 40 and 55% has been achieved for design A and B tip deflections, respectively. The modified design A with a gold layer results to an increase of 70% for tip deflection comparing to its optimal design.
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