Abstract
在测量多表面平行样品时，多面干涉会影响测量结果。为了能改善多面干涉问题，介绍了等光程干涉仪，并研究了参考镜楔角的最佳补偿方式。在等光程干涉仪中，由于参考镜和分光镜的楔角和倾角的存在，测量结果中会带有回程误差。根据参考镜楔角的不同情况采用了不同的补偿，理论分析并确定了各种补偿的放置方式和补偿量，同时研究了倾角和楔角的大小对于要被遮拦光束高度和像方数值孔径NA的影响。再利用Zemax进行不同补偿方式下的干涉仪仿真，并根据仿真得到的干涉图PV值分析回程误差的大小。分析表明：选用最佳补偿方式，参考镜楔角为1′，回程误差优于0.003个波长。
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