Abstract
Abstract Alumina films up to 5 μm thick have been deposited on fused silica and stainless steel substrates by a novel aerosol-jet deposition process at room temperature. The films are dense, uniform and adherent. Moreover, Al 2 O 3 film deposited on fused silica substrate is transparent for visible light. Transmittance of 1.5 μm thick alumina film is 83% measured at 800 nm, and that of 5.5 μm thick film is 68%. Scanning electron microscopy images and XRD analysis have revealed that the films have α-Al 2 O 3 crystallite structure however crystallite size is order of magnitude smaller than that raw material powder. Vickers microhardness of the films deposited on stainless steel has been measured. Aerosol-jet deposition becomes promising method for surface coating.
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