Abstract
We report on the optical waveguides, in both planar and ridge configurations, fabricated in LiTaO3 crystal by using carbon (C5+) ions irradiation at energy of 15MeV. The planar waveguide was produced by direct irradiation of swift C5+ ions, whilst the ridge waveguides were manufactured by using femtosecond laser ablation of the planar layer. The reconstructed refractive index profile of the planar waveguide has showed a barrier-shaped distribution, and the near-field waveguide mode intensity distribution was in good agreement with the calculated modal profile. After thermal annealing at 260°C in air, the propagation losses of both the planar and ridge waveguides were reduced to 10dB/cm.
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