Optical via for silicon photonic 3D-integrations

Abstract

We proposed an optical via through which both O- and C-band lights can be coupled from a fiber into different waveguide layers of a silicon photonic chip with multiple waveguide layers. The optical via consists of two grating couplers with various structures in different waveguide layers; these couplers are optimized through particle swarm optimization. From a single fiber, coupling efficiencies of −6.01 and −4.15 dB at 1300 and 1536 nm, respectively, were experimentally obtained for the two grating couplers.