Optical thin film inspection using parallel spectral domain optical coherence tomography

Abstract

The conventional Fourier domain optical coherence tomography system requires single scanner for two dimensional cross-sectional image and two scanners for volumetric image. Parallel spectral domain optical coherence tomography has advantage of single scanner for volumetric image, while two dimensional cross-sectional images are obtained by parallel acquisition of illuminated line on sample using area camera. In this study, the industrial inspection of optical thin film on touch screen panels was demonstrated using parallel spectral domain optical coherence tomography. The cross-sectional and volumetric images were acquired to detect the internal sub layer defects in optical thin film which are difficult to observe using visual or machine vision based inspection methods. The results indicate the possible application of the proposed system in touch screen panels inspection for quality assurance of product at consumer end.