Abstract
Abstract An optical sensing system based on a micromachined silicon resonator has been developed and has been successfully field tested in a harsh aerospace environment. Two vibrating silicon beams mounted above a diaphragm are addressed by the same optical fibre. As pressure is applied, the diaphragm generates stress changing the resonance frequency of a beam clamped at both ends. Additionally, a cantilever beam is located very close to the first beam which is only sensitive to the ambient temperature. Detailed investigations were undertaken to obtain a better insight into the photothermal activation and interferometric detection of the resonating beams. The sensor itself was fabricated from monocrystalline silicon using silicon to silicon fusion bonding and electro-chemical etch stop techniques. For packaged sensors with a pressure range from zero to 130 kPa or 3 MPa an overall accuracy of 0.05% full scale was achieved.
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