Abstract
This paper, which is being published in two parts, provides a summary and analysis of the various effects that occur when ellipsometry and reflection spectrophotometry are used to investigate wedge-shaped thin films. Part II of this paper describes the capabilities and limitations of various experimental approaches for studying wedge-shaped films. We describe the results obtained for films produced by atomic-layer deposition and plasma chemical deposition. We study the capabilities of ellipsometry for determining the optical constants and thicknesses of wedge-shaped films. We propose a simple spectrophotometric approach for routine studies of thick wedge-shaped films.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
