Abstract
Amorphous germanium carbides have been prepared by X-ray activated Chemical Vapor Deposition from germane/allene systems. The allene percentage and irradiation time (total dose) were correlated to the composition, the structural features, and the optical coefficients of the films, as studied by IR and UV-VIS spectroscopic techniques. The materials composition is found to change depending on both the allene percentage in the mixture and the irradiation time. IR spectroscopy results indicate that the solids consist of randomly bound networks of carbon and germanium atoms with hydrogen atoms terminating all the dangling bonds. Moreover, the elemental analysis results, the absence of both unsaturated bonds and CH 3 groups into the solids and the absence of allene autocondensation reactions products, indicate that polymerization reactions leading to mixed species, containing Ge-C bonds, are favored. E opt values around 3.5 eV have been found in most of the cases, and are correlated with C sp 3 -bonding configuration. The B 1/2 value, related to the order degree, has been found to be dependent on solid composition, atoms distribution in the material and hydrogenation degree of carbon atoms.
Highlights
The amorphous alloys, such as Si-C, Si-Ge and Ge-C are very important materials in current technologies and have stimulated a growing interest due to their electrical, optical and structural properties and their low cost compared with that of the crystalline form[1,2] making them suitable for different applications
The above considerations, the elemental analysis results and the absence of allene autocondensation reactions indicate that polymerization reactions leading to mixed species, containing Ge-C bonds, are favored
GexC1-x:H alloys have been obtained by X-Ray Chemical Vapor Deposition from mixtures of GeH4 with C3H4
Summary
The amorphous alloys, such as Si-C, Si-Ge and Ge-C are very important materials in current technologies and have stimulated a growing interest due to their electrical, optical and structural properties and their low cost compared with that of the crystalline form[1,2] making them suitable for different applications They can be prepared by several techniques: materials with composition, and properties, varying in a wide range are obtained changing the preparation method, the deposition conditions and/or the precursors [3,4,5,6,7,8,9,10,11,12,13,14,15,16,17,18,19,20,21,22,23,24,25,26,27,28,29,30,31]. An increase of hydrocarbon percentage in the mixture causes a decrease of the solid yield [32,33,34,35]
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