Abstract

For future micro- and nanotechnologies, the manufacturing of miniaturized, functionalized, and integrated devices is indispensable. In this paper, an assembly technique based on a bottom-up strategy that enables the manufacturing of complex microsystems using only optical methods is presented. A screw connection is transferred to the micrometer range and used to assemble screw- and nut-shaped microcomponents. Micro-stereolithography is performed by means of two-photon polymerization, and microstructures are fabricated and subsequently trapped, moved, and screwed together using optical forces in a holographic optical tweezer set-up. The design and construction of interlocking microcomponents and the verification of a stable and releasable joint form the main focus of this paper. The assembly technique is also applied to a microfluidic system to enable the pumping or intermixing of fluids on a microfluidic chip. This strategy not only enables the assembly of microcomponents but also the combination of different materials and features to form complex hybrid microsystems.

Highlights

  • Miniaturization and multifunction integration are ongoing trends in microsystem technologies

  • By generating four optical trapping spots with a total laser power of 174 mW, the nut can be trapped at its four handles, moved, and positioned over the screw, which is highlighted by the inserted rings (a)

  • It can be demonstrated that the contour of the nut becomes blurred, which indicates that it cannot be lifted by optical forces and a stable connection can be assumed

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Summary

Introduction

Miniaturization and multifunction integration are ongoing trends in microsystem technologies. Due to the low amount of liquid in the samples, rapid reaction times and low waste generation can be achieved and are highly advantageous features of such systems. To manufacture such devices with functional integration at the micro- or nanometer scale, microstereolithography processes can be utilized. Magnetic microstructures can be manufactured and actuated using an outer magnetic field. This feature enables the generation of magnetic microturbines and -rotors to displace the surrounding fluid in a microchannel for pumping or mixing applications[5]

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