Abstract
Microrings of varying sizes have been fabricated from InxGa1−xN/GaN (x∼0.15) multiple quantum wells (MQWs). Photolithography and dry etching techniques including both ion-beam and inductively coupled plasma etching were employed to pattern the III–nitride MQW microrings. Individual microrings were optically pumped and optical resonance modes were observed. The observed mode spacings were consistent with those expected for whispering-gallery (WG) modes within a resonant cavity of cylindrical symmetry, refractive index, and dimensions of the rings under investigation. The results obtained from the microring cavities were compared with those of the III–nitride MQW microdisk cavities. Our results have indicated that resonance modes corresponding to the radial and the WG modes are simultaneously present in microdisk cavities, but only WG modes are available from the microring cavities. Implications of our results on future GaN-based microcavity light emitters have been discussed.
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