Abstract
A qusai three dimensional aluminum metallic photonic crystal (Q-3D Al MPC) composed with five layers of Al rod arrays was fabricated from IC foundry. The qusai means that MPC was made out under constrain of the traditional metallization processes in IC manufacture during current foundry model, in that the vertical distance between layers is about 1 μm while the horizontal pitch is about 350 nm. The aim of this study is to evaluate the feasibility of mass production of MPC by using the modern IC technology. The novel optical properties are investigated in order to estimate the photonic band gap (PBG) behavior under this qusai structure. There exists an obvious PBG effect ranging from 3.5 to 7.5 μm and some other sharp period of transmission region.
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