Abstract
Abstract We present a study on a wide variety of Ti x Al 1 − x N magnetron sputtered thin films, covering the whole compositional range (0 ≤ x ≤ 1) and exhibiting both the hexagonal and cubic phases, using spectroscopic ellipsometry (SE) and the optical modeling based on Drude's model and two Lorentz oscillators in order to study the intraband and interband absorption. The cubic B1‐Ti x Al 1 − x N phase is formed for x > 0.3 and it is electrically conductive with conduction electron density and resistivity/conductivity varying with the Al content, while the hexagonal phase w‐Ti x Al 1 − x N (x x Al 1 − x N and its vast range from high band gap semiconductor to electron conductor offers exceptional potential for a variety of applications of Ti x Al 1 − x N in electronics.
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