Abstract

Thin films of Al2O3 with embedded Cu and Ag nanoparticles (NPs) are deposited by r.f. co-sputtering on glass substrates. The samples are annealed at 400°C and 500°C for 3 h in forming gas (N2+5% H2) to stimulate Cu and Ag nanoclusters' formation. Multilayer structures (stacks) such as Al2O3/Ag/Al2O3, ZnO:Al/Ag/ZnO:Al and Ag/ZnO:Al/Ag/ZnO:Al are deposited on glass substrate by consequently sputtering of the individual layers. Before deposition of the capping layers of Al2O3 and ZnO:Al, the bi-layer structures are annealed in vacuum for 50 min at 220°C or 400°C in the case of glass/Al2O3/Ag, and at 220°C in the case of glass/ ZnO:Al/Ag and glass/ Ag/ZnO:Al/Ag. The diffuse and specular reflectance and transmittance spectra are measured in the spectral range of 300–1200 nm to study the plasma resonance of Cu and Ag nanoparticles. The optical properties of the films and the stack structures are discussed.

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