Abstract
The high-quality waveguide structure in the Dy[Formula: see text]-doped Y3Al5O[Formula: see text] transparent ceramic is of significance for the application of integrated micro-light elements. However, there have been no reports on the preparation of optical waveguides by ion implantation in the Dy[Formula: see text]-doped Y3Al5O[Formula: see text] transparent ceramic. The work reports on the formation of optical planar waveguides by using the proton implantation in the Dy[Formula: see text]-doped Y3Al5O[Formula: see text] transparent ceramic. The acceleration energy and the dose of the protons are 400[Formula: see text]keV and [Formula: see text] ions/cm2, respectively. The structure of the fabricated waveguide is captured with the high-res/mag images by a metallurgical microscope. The dark-mode spectrum and the refractive index distribution are gained by the prism coupling system and the RCM software, respectively. The measurement and simulation of the near-field intensity distribution indicate the propagation of light field in the waveguide. The results are of potential to the compact devices in the photonics.
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