Optical properties of Se-doped ZnO nanocrystalline thin films deposition by thermionic vacuum arc system

Abstract

In this paper, the deposition of Se-doped ZnO nanocrystalline thin films onto glass and Si substrates was carried out using a thermionic vacuum arc deposition system. The band gap value of the Se-doped ZnO nanocrystalline thin film was determined as to be 3.1 eV. The crystallite size of the film deposited onto the Si substrate is approximately twice as large as that of the film deposited onto the glass substrate. A nano wrinkled network was observed in the film deposited onto a Si substrate was observed. The Zn/Se ratio of the films were determined to be 0.494 and 0.303 for the films deposited on glass and Si substrates, respectively. The transmittance value of the film on the Si substrate was nearly measured to be nearly 100 % in the wavelength range from 2.5 μm to 25 μm. Finally, Se- doped ZnO is a promising materials for the optical windows and thermal camera windows.