Abstract
The ion optical properties of an immersion ion source have been calculated in the presence of electron space charge. The ion source was an electron impact ionizer with planar geometry and a crossed beam configuration, assuming a well defined atomic beam. We present the focal properties and the third-order aberration coefficients, as a function of both the electron beam current and the ion extraction geometry. The image position is relatively unchanged by the electron beam or extraction geometry; however, there are significant changes to the magnification. The aberrations indicate that it is possible to preserve a spatial resolution in a typical imaging ion source of over a 6 mm field of vision. .
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