Abstract

We investigated the optical properties of silicon clusters and Si nanocrystallites using photolumine-scence (PL) and Raman scattering technique. Broad luminescence band in the red region was observed from Si-doped SiO2 thin films deposited by co-sputtering of Si and SiO2 onp-type Si (100) substrates, annealed in Ar and O2 atmosphere. Nanocrystalline Si particles fabricated by pulsed plasma processing technique showed infrared luminescence from as grown film at room temperature. Raman spectra from these films consisted of broad band superimposed on a sharp line near 516 cm−1 whose intensity, frequency, and width depend on the particle sizes arising from the phonon confinement in the nanocrystalline silicon. We also performed PL, Raman and resonantly excited PL measurements on porous silicon film to compare the optical properties of Si nanostructures grown by different techniques. An extensive computer simulation using empirical pseudo-potential method was carried out for 5–18 atoms Si clusters and the calculated gap energies were close to our PL data.

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