Abstract
A novel kind of La 2O 3 doped diamond-like carbon (DLC) films with thickness of 100–120 nm were deposited by unbalanced magnetron sputtering. Raman spectra and photoluminescence properties were measured by Raman spectrometer operated by 325 nm He-Cd laser and 514 nm Ar + laser, respectively. The intensities of Raman spectra and photoluminescence are higher than those of pure DLC films. The La 2O 3 doped DLC films have the potential promising for the application of solar cell coatings.
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