Abstract
Diamondlike carbon (DLC) is a hard, semitransparent material usually containing varying amounts of hydrogen. These materials have numerous potential applications, including use as coatings for infrared optics, and as such, the effects of damaging irradiation is of practical interest. In this paper we present results of variable angle spectroscopic ellipsometric (VASE) studies of ion-beam-deposited DLC films. These films have been further modified by directing 1-MeV gold ions, as well as 6.4-MeV fluorine ions, through the DLC and into the underlying silicon substrates, and the percentage of hydrogen in the film was measured versus fluence using proton recoil analysis. Optical analysis was performed assuming the Lorentz oscillator model. Three versions were used: one oscillator, two oscillator (with one fixed in energy), and two oscillator with all parameter variable. The latter model fits the VASE data extremely well, and the two oscillators can be interpreted as involving π to π* and σ to σ* band transitions. With ion modification the oscillators shift to lower photon energy, consistent with reduction in hydrogen concentration and possible increased graphitization.
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