Abstract
Amorphous titanium dioxide TiO2 thin films have been deposited using the dc sputtering technique. The structure of the films was analyzed by X-ray diffraction and the results showed non-crystalline behavior. The optical properties of these thin films have been investigated by means of optical reflectance and transmittance spectra. The optical energy gap Eg, the Urbach tails Eu, the single oscillator energy Eo, the dispersion energy Ed and the optical constants as refractive index n, extinction coefficient k dielectric constant and optical conductivity were estimated. Key words: Titanium dioxide, optical energy gap, refractive index, oscillator energy, dispersion energy.
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