Abstract
The processes of the formation and annealing of VnOm (n, m ≥ 2) vacancy–oxygen complexes in Czochralski silicon crystals irradiated with fast electrons and reactor neutrons have been studied by infrared absorption Fourier spectroscopy. A number of arguments are presented in favor of identification of absorption bands at 829.3 and 844.2 cm–1 as being related to local vibrational modes of V2O2 and V3O2 complexes, respectively.
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