Abstract
We investigated the optical characteristics and microstructures of wave plates com- posed of Ta2O5ð100 − x Þþ TiO2ðxÞ and prepared by the so-called serial bideposition technique. While a single-layer film prepared by conventional oblique deposition technique has a tilted columnar structure (i.e., tilted optical axis), a serial bideposition film has a narrow, long col- umnar structure; this ensures that the optical axis of the film is along the quasinormal to the substrate, thus reducing haze. The influence of using additives with Ta2O5 was investigated as well. It was found that additive TiO2 improves optical transmittance at shorter wavelengths. For verifying the advantage of this type of wave plates, quarter wave plates with optimized TiO2 content were fabricated and their optical performance and reliability were evaluated against those of organic-type wave plates. The results show that the inorganic wave plate prepared by serial bideposition is advantageous for applications where high-transmittance and high-temperature durability are essential. © The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI. (DOI: 10.1117/1.JNP.8.083991)
Highlights
The demand for optical devices with high-light resistance and thermal durability is increasing because requirements such as increased luminescence and miniaturization of liquid crystal display (LCD) projectors
It is observed that the serial bideposition film is composed of narrow, long, columnar structures, and that many bundles and gaps derived from the columnar structures were along the normal to the Ta2O5 flux deposition plane
We investigated the optical characteristics and microstructures of serial bideposition Ta2O5ð100 − xÞ þ TiO2ð1 − xÞ (0≦x≦100 wt%) films
Summary
The demand for optical devices with high-light resistance and thermal durability is increasing because requirements such as increased luminescence and miniaturization of liquid crystal display (LCD) projectors. Polymer-based wave plates are widely used in LCD projectors. They contain organic materials that degrade under long, intense exposure to light from a superhigh-pressure mercury lamp. It is well known that obliquely deposited thin films can be applied to wave plates.[1,2,3,4] The oblique deposition can lead to the formation of birefringent layers on any substrate at low cost without size limitation. Because these wave plates are composed of inorganic materials, superior thermal durability is expected
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