Optical phased array using high-contrast grating all-pass filters for fast beam steering

Abstract

A novel 8x8 optical phased array based on high-contrast grating (HCG) all-pass filters (APFs) is experimentally demonstrated with high speed beam steering. Highly efficient phase tuning is achieved by micro-electro-mechanical actuation of the HCG to tune the cavity length of the APFs. Using APF phase-shifters allows a large phase shift with an actuation range of only tens of nanometers. The ultrathin HCG further ensures a high tuning speed (0.626 MHz). Both one-dimensional and two-dimensional HCGs are demonstrated as the actuation mirrors of the APF arrays with high beam steering performance.