Optical path difference measurements with a two-step parallel phase shifting interferometer based on a modified Michelson configuration

Abstract

We report an optical implementation of a parallel phase-shifting quasi-common path interferometer using two modified Michelson interferometers to generate two interferograms. By using a displaceable polarizer’s array, placed on the image plane, we can obtain four phase-shifted interferograms in two captures. The system operates as a quasi-common path interferometer generating four beams, which are to interfere with alignment procedures on the mirrors of the Michelson configurations. The optical phase data are retrieved using the well-known four-step algorithms. To present the capabilities of the system, experimental results obtained from transparent structures are presented.