Abstract
Diamond film can be used as optical window materials, mask materials and coating materials of optical device and solar cells. Diamond films with different thickness were prepared by HFCVD method. Raman scattering measurement, SEM and AFM show a good diamond character. Optical parameters in infrared region, such as refractive index (n) and extinction coefficient (k) of diamond films with different thickness were determined by spectroscopic ellipsometry method with a proper fitting model.
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