Optical Mueller matrix modeling of chiral AlxIn1 − xN nanospirals

Abstract

Metamaterials in the form of chiral nanostructures have shown great potential for applications such as chemical and biochemical sensors and broadband or wavelength tunable circular polarizers. Here we demonstrate a method to produce tailored transparent chiral nanostructures with the wide-bandgap semiconductor AlxIn1−xN. A series of anisotropic and transparent films of AlxIn1−xN were produced using curved-lattice epitaxial growth on metallic buffer layers. By controlling the sample orientation during dual magnetron sputter deposition, nanospirals with right-handed or left-handed chirality were produced. Using a dual rotating compensator ellipsometer in reflection mode, the full Mueller matrix was measured in the spectral range 245–1700nm at multiple angles of incidence. The samples were rotated one full turn around their normal during measurements to provide a complete description of the polarization properties in all directions. For certain wavelengths, unpolarized light reflected off these films becomes highly polarized with a polarization state close to circular. Nanostructured films with right- and left-handed chirality produce reflections with right- and left-handed near-circularly polarized light, respectively. A model with a biaxial layer in which the optical axes are rotated from bottom to top was fitted to the Mueller-matrix data. Hence we can perform non-destructive structural analysis of the complex thin layers and confirm the tailored structure. In addition, the refractive index, modeled with a biaxial Cauchy dispersion model, is obtained for the AlxIn1−xN films.