Abstract

LiNbO3 (LN) optical modulators with Y-Ba-Cu-O (YBCO) superconducting electrodes have been investigated. Coplanar Resonant type electrode was formed on LN substrate with Ti: LN optical waveguide. Low surface resistance of this electrode resulted in excellent resonance property of high Q-factor 7000 at 5.1GHz. However, optical loss in optical waveguide increased during the deposition process.

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