Abstract
The aim of this paper is to prepare multi-layered ITO thin films by a low cost and environmental-friendly method for different applications (optoelectronics, sensors, etc.). ITO films with 15 layers were obtained by successive depositions using the sol-gel & dip-coating method on three different substrates: glass, SiO2/glass and SiO2/Si. Comparative structural, morphological and optical characterization were performed by X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), Cross Section Transmission Electron Microscopy (XTEM) coupled with Selected Area Electron Diffraction (SAED), Infrared Spectroscopic Ellipsometry (IRSE) and Raman spectroscopy analyses. The optical constants (refractive index n and extinction coefficient k) were determined in a large spectral range (300-27500 cm−1) by spectroscopic ellipsometry (SE). The thicknesses determined by SE were confirmed by HRTEM (High Resolution TEM) measurements which also presents in detail the textural properties of the ITO films at nanometric level. A comparison between IRSE and Raman analysis in the infrared active region was presented.
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