Optical microscopy imaging using the contrast source inversion method

Abstract

The reconstruction of the permittivity profile from optical diffraction tomography data is discussed. In order to arrive at sub-100 nm resolution it is necessary to employ nonlinear inversion methods that yield quantitative information of the permittivity distribution. Therefore, the so-called multiplicative regularized contrast source inversion (MRCSI) method is adopted to the problem at hand. For a two-dimensional representative example it is demonstrated that, using a wavelength of 400 nm, resolutions of the order of 20 to 30 nm can be achieved. We show that the MRCSI method is very effective in noisy environments and is able to handle very limited data.